Project Details
Description
This grant funds the purchase of an rf/microwave source and a spectrum analyzer, for use in two ongoing research projects. The first project involves research in plasma processing, in support of Sematech research on semiconductor fabrication. The second involves squeezed- state enhanced FM spectroscopy, applied to gas sensing problems which arise in processing electronic materials.
Status | Finished |
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Effective start/end date | 15/08/89 → 31/01/91 |
Funding
- National Science Foundation
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