TY - GEN
T1 - 3-D nanofabrication using nanostructured photoresist film as free-standing appliqué
AU - Liu, Yuyang
AU - Du, Ke
AU - Wathuthanthri, Ishan
AU - Xu, Wei
AU - Choi, Chang Hwan
PY - 2012
Y1 - 2012
N2 - This paper reports a three-dimensional (3-D) nanofabrication method using a nano-patterned photoresist (PR) film as a free-standing flexible template. In contrast to the conventional usage of PR as a two-dimensional (2-D) pattern transfer layer on a planar substrate in MEMS applications, the lithographically predefined PR layer is released from the supporting substrate in the form of a free-standing film and then applied as an appliqué for the 3-D (e.g., onto a curved surface) and hierarchical (e.g., onto a micro-textured surface) nano-patterning. The ultrathin free-standing PR films show excellent flexibility, integrality, and robustness under various mechanical manipulations and further pattern transfer processes such as deposition and etching after being appliquéd. Enabled by such versatility, periodic nanostructures are successfully demonstrated on various substrates via various fabrication techniques. The results suggest that the application of the free-standing PR films as appliqué will enables them to be used as flexible and re-useable templates or elements in MEMS fabrication and devices, especially for convenient and efficient 3-D nanofabrication over a large area.
AB - This paper reports a three-dimensional (3-D) nanofabrication method using a nano-patterned photoresist (PR) film as a free-standing flexible template. In contrast to the conventional usage of PR as a two-dimensional (2-D) pattern transfer layer on a planar substrate in MEMS applications, the lithographically predefined PR layer is released from the supporting substrate in the form of a free-standing film and then applied as an appliqué for the 3-D (e.g., onto a curved surface) and hierarchical (e.g., onto a micro-textured surface) nano-patterning. The ultrathin free-standing PR films show excellent flexibility, integrality, and robustness under various mechanical manipulations and further pattern transfer processes such as deposition and etching after being appliquéd. Enabled by such versatility, periodic nanostructures are successfully demonstrated on various substrates via various fabrication techniques. The results suggest that the application of the free-standing PR films as appliqué will enables them to be used as flexible and re-useable templates or elements in MEMS fabrication and devices, especially for convenient and efficient 3-D nanofabrication over a large area.
UR - http://www.scopus.com/inward/record.url?scp=84860482737&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84860482737&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2012.6170149
DO - 10.1109/MEMSYS.2012.6170149
M3 - Conference contribution
AN - SCOPUS:84860482737
SN - 9781467303248
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 192
EP - 195
BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Y2 - 29 January 2012 through 2 February 2012
ER -