3-D nanofabrication using nanostructured photoresist film as free-standing appliqué

Yuyang Liu, Ke Du, Ishan Wathuthanthri, Wei Xu, Chang Hwan Choi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

8 Scopus citations

Abstract

This paper reports a three-dimensional (3-D) nanofabrication method using a nano-patterned photoresist (PR) film as a free-standing flexible template. In contrast to the conventional usage of PR as a two-dimensional (2-D) pattern transfer layer on a planar substrate in MEMS applications, the lithographically predefined PR layer is released from the supporting substrate in the form of a free-standing film and then applied as an appliqué for the 3-D (e.g., onto a curved surface) and hierarchical (e.g., onto a micro-textured surface) nano-patterning. The ultrathin free-standing PR films show excellent flexibility, integrality, and robustness under various mechanical manipulations and further pattern transfer processes such as deposition and etching after being appliquéd. Enabled by such versatility, periodic nanostructures are successfully demonstrated on various substrates via various fabrication techniques. The results suggest that the application of the free-standing PR films as appliqué will enables them to be used as flexible and re-useable templates or elements in MEMS fabrication and devices, especially for convenient and efficient 3-D nanofabrication over a large area.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages192-195
Number of pages4
DOIs
StatePublished - 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 29 Jan 20122 Feb 2012

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/TerritoryFrance
CityParis
Period29/01/122/02/12

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