TY - JOUR
T1 - A Flexible Pressure Sensor with Sandwiched Carpets of Vertically Aligned Carbon Nanotubes Partially Embedded in Polydimethylsiloxane Substrates
AU - Zhang, Runzhi
AU - Palumbo, Anthony
AU - Hader, Grzegorz
AU - Yan, Kang
AU - Chang, Jason
AU - Wang, Hongjun
AU - Yang, Eui Hyeok
N1 - Publisher Copyright:
© 2001-2012 IEEE.
PY - 2020/10/15
Y1 - 2020/10/15
N2 - This paper presents a flexible pressure sensor composed of two face-to-face electrodes of vertically aligned carbon nanotubes (VACNTs) carpets partially embedded in polydimethylsiloxane(PDMS) substrates. VACNTs were grown using atmospheric pressure chemical vapor deposition (APCVD) on a Si/SiO2 substrate and transferred onto PDMS for partial embedment. This unique synthesis permitted a rapid and facile integration of a flexible and stretchable platform for the pressure sensor. The change of resistance occurs due to the external pressure applied orthogonal to the surface. The substrate was stretched to 180% and bent at bending radii of 87 mm and 105 mm. The pressure sensor exhibited the response times of 40 ms during loading and 60 ms during unloading. As a proof-of-concept, the sensor was attached on human skin; the heart rate, muscle flexing, and walking signals of an individual have been measured. In respect to durability, this sensor also showed a stable performance for 10,000 loading/unloading cycles with a resistance retention of 82% demonstrating its long-term use for repeated cycles toward practical applications.
AB - This paper presents a flexible pressure sensor composed of two face-to-face electrodes of vertically aligned carbon nanotubes (VACNTs) carpets partially embedded in polydimethylsiloxane(PDMS) substrates. VACNTs were grown using atmospheric pressure chemical vapor deposition (APCVD) on a Si/SiO2 substrate and transferred onto PDMS for partial embedment. This unique synthesis permitted a rapid and facile integration of a flexible and stretchable platform for the pressure sensor. The change of resistance occurs due to the external pressure applied orthogonal to the surface. The substrate was stretched to 180% and bent at bending radii of 87 mm and 105 mm. The pressure sensor exhibited the response times of 40 ms during loading and 60 ms during unloading. As a proof-of-concept, the sensor was attached on human skin; the heart rate, muscle flexing, and walking signals of an individual have been measured. In respect to durability, this sensor also showed a stable performance for 10,000 loading/unloading cycles with a resistance retention of 82% demonstrating its long-term use for repeated cycles toward practical applications.
KW - Carbon nanotubes
KW - flexible electrodes
KW - pressure mapping
KW - pressure sensor
KW - stretchability
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U2 - 10.1109/JSEN.2020.2999261
DO - 10.1109/JSEN.2020.2999261
M3 - Article
AN - SCOPUS:85091775684
SN - 1530-437X
VL - 20
SP - 12146
EP - 12153
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
IS - 20
M1 - 9105004
ER -