Abstract
A novel direct contact MEMS switch has been developed with compliant lateral metal contacts to address the needs of low contact resistance and long life cycles. The device is unique in self-alignment of the contact surfaces, self-cleaning of particles generated during operations and mechanical anchoring method of the contact metal in the Su-8 switch structures. It has been demonstrated experimentally that a low contact resistance of about 0.1 Ω is maintained for up to 10 billions of cycles of operation. The switch design is compatible with our thin film PZT actuating technology and can be readily integrated into a fully functional MEMS switch.
| Original language | English |
|---|---|
| Article number | MP35 |
| Pages (from-to) | 195-198 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| State | Published - 2005 |
| Event | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 30 Jan 2005 → 3 Feb 2005 |