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A Nanochannel Fabrication Technique without Nanolithography
Choonsup Lee
,
Eui Hyeok Yang
, Nosang V. Myung
, Thomas George
Department of Mechanical Engineering
Jet Propulsion Laboratory, California Institute of Technology
Research output
:
Contribution to journal
›
Article
›
peer-review
91
Scopus citations
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Material Science
Nanolithography
100%
Surface
50%
Oxidation Reaction
50%
Chemical Mechanical Planarization
50%
Engineering
Fabrication Technique
100%
Sio2 Layer
50%
Chemical Mechanical Polishing
50%
Thermal Oxidation
50%