A new fabrication process for microstructures with high area-to-mass ratios by stiffness enhancement

Zhongjing Ren, Jianping Yuan, Xiaoyu Su, Hao Sun, Richard Galos, Yong Shi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

10 Scopus citations

Abstract

A new fabrication process for stiffness-enhanced microstructures with high area-to-mass ratios is presented in this paper. In order to acquire an enhanced stiffness without ruining the structural parameter of area-to-mass ratio, multilayered metallic microstructures are proposed and fabricated by surface and bulk fabrication processes from Micro-Electro-Mechanical Systems (MEMS) technologies. Microstructures based on beams with symmetrically deposited metals are physically built and tested on wafers. A sacrificial silicon layer is used to form gaps between bimetal layers and the microstructures can be deployed vertically when heated due to the effect of thermal mismatch between different materials. The results show a dramatic thickness increase when actuated by Joule heating, and thus a great bending stiffness enhancement.

Original languageEnglish
Title of host publication23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
ISBN (Electronic)9780791851791
DOIs
StatePublished - 2018
EventASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2018 - Quebec City, Canada
Duration: 26 Aug 201829 Aug 2018

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Conference

ConferenceASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2018
Country/TerritoryCanada
CityQuebec City
Period26/08/1829/08/18

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