TY - JOUR
T1 - A normally latched, large-stroke, inchworm microactuator
AU - Toda, Risaku
AU - Yang, Eui Hyeok
PY - 2007/8/1
Y1 - 2007/8/1
N2 - This paper presents the successful demonstration of a large-stroke, high-precision inchworm microactuator. The actuator is capable of zero-power latching, or forcibly maintaining its position by using pre-stressed spring load. The actuator is driven by a combination of a PZT-stack actuator unit for slider thrust and electrostatic comb-drive units for slider grip. Incremental step size is precisely adjustable to the tens of nanometers level by controlling the PZT-stack actuator voltage. The observed minimum step size was 59 nm/cycle. Large stroke is obtained by repeating the operation sequence numerous times. A large-stroke actuation exceeding 600 νm has been demonstrated. There is no conceivable limit to the stroke except for the length of the slider and external load.
AB - This paper presents the successful demonstration of a large-stroke, high-precision inchworm microactuator. The actuator is capable of zero-power latching, or forcibly maintaining its position by using pre-stressed spring load. The actuator is driven by a combination of a PZT-stack actuator unit for slider thrust and electrostatic comb-drive units for slider grip. Incremental step size is precisely adjustable to the tens of nanometers level by controlling the PZT-stack actuator voltage. The observed minimum step size was 59 nm/cycle. Large stroke is obtained by repeating the operation sequence numerous times. A large-stroke actuation exceeding 600 νm has been demonstrated. There is no conceivable limit to the stroke except for the length of the slider and external load.
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U2 - 10.1088/0960-1317/17/8/039
DO - 10.1088/0960-1317/17/8/039
M3 - Article
AN - SCOPUS:34547678081
SN - 0960-1317
VL - 17
SP - 1715
EP - 1720
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 8
M1 - 039
ER -