A piezoelectric microvalve for micropropulsion

Eui Hyeok Yang, Nishant Rohatgi, Larry Wild

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper presents a piezoelectric microvalve technology with a high pressure handling capability for micropropulsion applications. The device is a normally closed valve fabricated mostly by the micromachining of silicon. The valve consists of a custom designed piezoelectric stack actuator bonded onto silicon valve components in a stainless steel housing. Major elements of the silicon valve design include narrow edge seating rings and tensile-stressed silicon tethers that contribute to the desired normally closed leak-tight operation. No leak has been detected from a soap solution test at differential pressures of 0~500 psi for a normally closed valve structure, indicating a leak rate of 0.001sccm or lower has been achieved. Piezoelectric operation has been successfully demonstrated at a differential pressure of 500 psi. A flow rate of 20 sccm at 100 psi has been obtained at 50 V.

Original languageEnglish
Title of host publicationNanoTech 2002 - "At the Edge of Revolution"
DOIs
StatePublished - 2002
EventNanoTech 2002 - "At the Edge of Revolution" - Houston, TX, United States
Duration: 9 Sep 200212 Sep 2002

Publication series

NameNanoTech 2002 - "At the Edge of Revolution"

Conference

ConferenceNanoTech 2002 - "At the Edge of Revolution"
Country/TerritoryUnited States
CityHouston, TX
Period9/09/0212/09/02

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