@inproceedings{cb8013ab2d8744dfaa4b8b2e8c769028,
title = "A piezoelectric microvalve for micropropulsion",
abstract = "This paper presents a piezoelectric microvalve technology with a high pressure handling capability for micropropulsion applications. The device is a normally closed valve fabricated mostly by the micromachining of silicon. The valve consists of a custom designed piezoelectric stack actuator bonded onto silicon valve components in a stainless steel housing. Major elements of the silicon valve design include narrow edge seating rings and tensile-stressed silicon tethers that contribute to the desired normally closed leak-tight operation. No leak has been detected from a soap solution test at differential pressures of 0~500 psi for a normally closed valve structure, indicating a leak rate of 0.001sccm or lower has been achieved. Piezoelectric operation has been successfully demonstrated at a differential pressure of 500 psi. A flow rate of 20 sccm at 100 psi has been obtained at 50 V.",
author = "Yang, {Eui Hyeok} and Nishant Rohatgi and Larry Wild",
year = "2002",
doi = "10.2514/6.2002-5713",
language = "English",
isbn = "9781624101267",
series = "NanoTech 2002 - {"}At the Edge of Revolution{"}",
booktitle = "NanoTech 2002 - {"}At the Edge of Revolution{"}",
note = "NanoTech 2002 - {"}At the Edge of Revolution{"} ; Conference date: 09-09-2002 Through 12-09-2002",
}