Characterization and adhesion of interacting surfaces in capacitive rf mems switches undergoing cycling
- Seung Min Yeo
- , Andreas A. Polycarpou
- , Spyros I. Tseregounis
- , Negar Tavassolian
- , John Papapolymerou
- University of Illinois at Urbana-Champaign
- Georgia Institute of Technology
Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review