Abstract
Large-stroke micromachined deformable mirror technology can boost the imaging performance of an otherwise non-rigid, lower-quality telescope structure. The proposed deformable mirror concept in this paper combines a microfabricated large-stroke piezoelectric actuator with a reflective membrane "transferred" in its entirety from a separate wafer. This process allows the large-stroke actuation of the continuous membrane and can provide the necessary large wavefront correction. The micromachined deformable mirror approach allows mass-production of actuators as well as scalable structures with, high actuator densities. The piezoelectric unimorph actuator design approach delivers large actuator stroke with a highly localized influence function, while maintaining a surface figure of optical quality. Both of these component fabrication techniques are easily scaled to accommodate deformable mirrors with very large areas.
Original language | English |
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Pages (from-to) | 326-333 |
Number of pages | 8 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4983 |
State | Published - 2003 |
Event | MOEMS and Miniaturized Systems III - San Jose, CA, United States Duration: 27 Jan 2003 → 29 Jan 2003 |
Keywords
- Adaptive Optics (AO)
- Continuous Mirror
- Deformable Mirror (DM)
- Microelectromechanical Systems (MEMS)
- Piezoelectric Actuator
- Unimorph Membrane
- Wafer-Scale Membrane Transfer