TY - GEN
T1 - Controlled growth of 2D heterostructures and prevention of TMD oxidation
AU - Yang, E. H.
AU - Kang, K.
AU - Godin, K.
AU - Wang, X.
AU - Fu, S.
AU - Chen, S.
N1 - Publisher Copyright:
© COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.
PY - 2018
Y1 - 2018
N2 - This paper presents a review of the controlled growth of transition metal dichalcogenide (TMD) heterostructures, and the elucidation of the role of underlying two dimensional (2D) materials on temporal degradation of transition metal dichalcogenides (TMDs). Chemical vapor deposition (CVD)-growth is carried out to achieve localized, patterned, single crystalline or polycrystalline monolayers of TMDs, including MoS2, WS2, WSe2 and MoSe2, as well as their heterostructures. The localized growth of TMDs has an important implication for nonlinear optics applications. Extensive material characterization is performed to illuminate the role of dissimilar 2D substrates in the prevention of interior defects in TMDs. This characterization provides a detailed observation of the oxidation rates and behaviors of TMDs, which corroborate the role of underlying 2D layers in the prevention of in-Air oxidation in TMDs. The epitaxial growth is demonstrated to create TMDs on hBN and graphene, as well as vertical/lateral heterostructures of TMDs, uniquely forming in-phase 2D heterostructures.
AB - This paper presents a review of the controlled growth of transition metal dichalcogenide (TMD) heterostructures, and the elucidation of the role of underlying two dimensional (2D) materials on temporal degradation of transition metal dichalcogenides (TMDs). Chemical vapor deposition (CVD)-growth is carried out to achieve localized, patterned, single crystalline or polycrystalline monolayers of TMDs, including MoS2, WS2, WSe2 and MoSe2, as well as their heterostructures. The localized growth of TMDs has an important implication for nonlinear optics applications. Extensive material characterization is performed to illuminate the role of dissimilar 2D substrates in the prevention of interior defects in TMDs. This characterization provides a detailed observation of the oxidation rates and behaviors of TMDs, which corroborate the role of underlying 2D layers in the prevention of in-Air oxidation in TMDs. The epitaxial growth is demonstrated to create TMDs on hBN and graphene, as well as vertical/lateral heterostructures of TMDs, uniquely forming in-phase 2D heterostructures.
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U2 - 10.1117/12.2300568
DO - 10.1117/12.2300568
M3 - Conference contribution
AN - SCOPUS:85049159544
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Micro- and Nanotechnology Sensors, Systems, and Applications X
A2 - Islam, M. Saif
A2 - George, Thomas
A2 - Dutta, Achyut K.
T2 - 2018 Micro- and Nanotechnology (MNT) Sensors, Systems, and Applications X Conference
Y2 - 15 April 2018 through 19 April 2018
ER -