Deposition of Silicon Carbonitride Films Using Methylsilazane

Honghua Du, Bernard Gallois, Kenneth E. Gonsalves

Research output: Contribution to journalArticlepeer-review

11 Scopus citations
Original languageEnglish
Pages (from-to)569-571
Number of pages3
JournalChemistry of Materials
Volume1
Issue number6
DOIs
StatePublished - 1 Nov 1989

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