Original language | English |
---|---|
Pages (from-to) | 569-571 |
Number of pages | 3 |
Journal | Chemistry of Materials |
Volume | 1 |
Issue number | 6 |
DOIs | |
State | Published - 1 Nov 1989 |
Deposition of Silicon Carbonitride Films Using Methylsilazane
Honghua Du, Bernard Gallois, Kenneth E. Gonsalves
Research output: Contribution to journal › Article › peer-review
11
Scopus
citations