| Original language | English |
|---|---|
| Pages (from-to) | 569-571 |
| Number of pages | 3 |
| Journal | Chemistry of Materials |
| Volume | 1 |
| Issue number | 6 |
| DOIs | |
| State | Published - 1 Nov 1989 |
Deposition of Silicon Carbonitride Films Using Methylsilazane
Honghua Du, Bernard Gallois, Kenneth E. Gonsalves
Research output: Contribution to journal › Article › peer-review
11
Scopus
citations