TY - JOUR
T1 - Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space
AU - Yang, Eui Hyeok
AU - Wiberg, Dean V.
AU - Dekany, Richard G.
PY - 2000
Y1 - 2000
N2 - A novel Microelectromechanical Systems (MEMS) deformable mirror (DM) technology for large, light weight, segmented space telescopes is being proposed. This technology is reported to provide an unprecedented imaging capability in a visible and near infrared spectral range. The MEMS-DM proposed in this paper consists of a continuous membrane mirror supported by electrostatic actuators with a pixel-to-pixel spacing as small as 200 μm. An array of 4×4 electrostatic actuators for the DM has been successfully fabricated by a new membrane transfer technique. The fabricated actuator membrane has been characterized by using an optical surface profiler. The actuator shows a vertical deflection of 0.37 μm at 55 V. This device can also address requirements for smaller size and high resolution applications involving optical transmission through aberrating mediums such as imaging and optical communications through atmospheres, high resolution biometric retina signatures through the eye and endoscopic investigation of tissues and organs.
AB - A novel Microelectromechanical Systems (MEMS) deformable mirror (DM) technology for large, light weight, segmented space telescopes is being proposed. This technology is reported to provide an unprecedented imaging capability in a visible and near infrared spectral range. The MEMS-DM proposed in this paper consists of a continuous membrane mirror supported by electrostatic actuators with a pixel-to-pixel spacing as small as 200 μm. An array of 4×4 electrostatic actuators for the DM has been successfully fabricated by a new membrane transfer technique. The fabricated actuator membrane has been characterized by using an optical surface profiler. The actuator shows a vertical deflection of 0.37 μm at 55 V. This device can also address requirements for smaller size and high resolution applications involving optical transmission through aberrating mediums such as imaging and optical communications through atmospheres, high resolution biometric retina signatures through the eye and endoscopic investigation of tissues and organs.
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U2 - 10.1117/12.405766
DO - 10.1117/12.405766
M3 - Conference article
AN - SCOPUS:0034538706
SN - 0277-786X
VL - 4091
SP - 83
EP - 89
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Imaging Technology and Telescopes
Y2 - 30 July 2000 through 31 July 2000
ER -