Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space

Eui Hyeok Yang, Dean V. Wiberg, Richard G. Dekany

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

A novel Microelectromechanical Systems (MEMS) deformable mirror (DM) technology for large, light weight, segmented space telescopes is being proposed. This technology is reported to provide an unprecedented imaging capability in a visible and near infrared spectral range. The MEMS-DM proposed in this paper consists of a continuous membrane mirror supported by electrostatic actuators with a pixel-to-pixel spacing as small as 200 μm. An array of 4×4 electrostatic actuators for the DM has been successfully fabricated by a new membrane transfer technique. The fabricated actuator membrane has been characterized by using an optical surface profiler. The actuator shows a vertical deflection of 0.37 μm at 55 V. This device can also address requirements for smaller size and high resolution applications involving optical transmission through aberrating mediums such as imaging and optical communications through atmospheres, high resolution biometric retina signatures through the eye and endoscopic investigation of tissues and organs.

Original languageEnglish
Pages (from-to)83-89
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4091
DOIs
StatePublished - 2000
EventImaging Technology and Telescopes - San Diego, CA, USA
Duration: 30 Jul 200031 Jul 2000

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