Design considerations for harvesting vibration energy at mems scale: Review

Vinod R. Challa, Frank T. Fisher

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Vibration based energy harvesting has wide potential applications in areas such as wireless sensors networks and ultra low power devices. While there have been various technologies through which vibration energy has been harvested, there is a considerable need to improve the power density of such devices. Recently, efforts have been made in developing MEMS scale devices as they would have increased power density and also provide ease of integration with wireless sensors and low power electronic devices. The aim of this paper is to present the generic and specific design considerations for vibration energy harvesting at the MEMS scale for electrostatic, electromagnetic and piezoelectric techniques. The effect of external load such as load resistance employed for peak power output on the total damping in the system is discussed. The typical MEMS scale vibrating structures such as cantilever beam, fixed-fixed beam and membrane are also presented.

Original languageEnglish
Title of host publicationProceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
Pages377-385
Number of pages9
EditionPART A
DOIs
StatePublished - 2010
EventASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009 - Lake Buena Vista, FL, United States
Duration: 13 Nov 200919 Nov 2009

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings
NumberPART A
Volume12

Conference

ConferenceASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
Country/TerritoryUnited States
CityLake Buena Vista, FL
Period13/11/0919/11/09

Keywords

  • Efficiency
  • MEMS scale energy harvesting
  • Power density
  • Vibrating structures
  • Vibration energy scavenging

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