TY - GEN
T1 - Design considerations for harvesting vibration energy at mems scale
T2 - ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
AU - Challa, Vinod R.
AU - Fisher, Frank T.
PY - 2010
Y1 - 2010
N2 - Vibration based energy harvesting has wide potential applications in areas such as wireless sensors networks and ultra low power devices. While there have been various technologies through which vibration energy has been harvested, there is a considerable need to improve the power density of such devices. Recently, efforts have been made in developing MEMS scale devices as they would have increased power density and also provide ease of integration with wireless sensors and low power electronic devices. The aim of this paper is to present the generic and specific design considerations for vibration energy harvesting at the MEMS scale for electrostatic, electromagnetic and piezoelectric techniques. The effect of external load such as load resistance employed for peak power output on the total damping in the system is discussed. The typical MEMS scale vibrating structures such as cantilever beam, fixed-fixed beam and membrane are also presented.
AB - Vibration based energy harvesting has wide potential applications in areas such as wireless sensors networks and ultra low power devices. While there have been various technologies through which vibration energy has been harvested, there is a considerable need to improve the power density of such devices. Recently, efforts have been made in developing MEMS scale devices as they would have increased power density and also provide ease of integration with wireless sensors and low power electronic devices. The aim of this paper is to present the generic and specific design considerations for vibration energy harvesting at the MEMS scale for electrostatic, electromagnetic and piezoelectric techniques. The effect of external load such as load resistance employed for peak power output on the total damping in the system is discussed. The typical MEMS scale vibrating structures such as cantilever beam, fixed-fixed beam and membrane are also presented.
KW - Efficiency
KW - MEMS scale energy harvesting
KW - Power density
KW - Vibrating structures
KW - Vibration energy scavenging
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U2 - 10.1115/IMECE2009-12873
DO - 10.1115/IMECE2009-12873
M3 - Conference contribution
AN - SCOPUS:77954278691
SN - 9780791843857
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 377
EP - 385
BT - Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
Y2 - 13 November 2009 through 19 November 2009
ER -