Design, fabrication, and applications of large-area wellordered dense-array threedimensional nanostructures

Chang Hwan Choi; Chang Jin Kim

doi:10.4032/9789814241120

Design, fabrication, and applications of large-area wellordered dense-array threedimensional nanostructures

Chang Hwan Choi
, Chang Jin Kim

Department of Mechanical Engineering

University of California at Los Angeles

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

A highly effective fabrication process combining interference lithography with deep reactive ionetching is described. This simple technique makes it possible to build well-ordered dense-array of nanostructures with good control of pattern regularity and size over a large area. The unique three-dimensional structures possible with this process can have a variety of applications in electronics and other physical sciences.

Original language	English
Title of host publication	Nanostructures in Electronics and Photonics
Pages	113-129
Number of pages	17
DOIs	https://doi.org/10.4032/9789814241120
State	Published - 1 Apr 2008

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abstract = "A highly effective fabrication process combining interference lithography with deep reactive ionetching is described. This simple technique makes it possible to build well-ordered dense-array of nanostructures with good control of pattern regularity and size over a large area. The unique three-dimensional structures possible with this process can have a variety of applications in electronics and other physical sciences.",

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N2 - A highly effective fabrication process combining interference lithography with deep reactive ionetching is described. This simple technique makes it possible to build well-ordered dense-array of nanostructures with good control of pattern regularity and size over a large area. The unique three-dimensional structures possible with this process can have a variety of applications in electronics and other physical sciences.

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BT - Nanostructures in Electronics and Photonics

ER -

Design, fabrication, and applications of large-area wellordered dense-array threedimensional nanostructures

Abstract

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