Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability

Xiaoyu Su, Zhongjing Ren, Quan Pan, Ming Lu, Fernando Camino, Yong Shi

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

The structure design of micro cantilever beams(MCBs), which has a significant effect on MCBs' controllable actuation range, is usually restricted by the establishment of the inner electric circuit. This paper proposes the design of a micro electro-controllable twisting cantilever beam (METCB). The architecture and the fabrication diagram of the proposed METCB are presented before its features are theoretically and experimentally validated. In detail, the analytical validation includes a sequence of two models: electro-thermal and thermo-mechanical. Through these two models, the thermal distribution along the METCB and the deformation brought by the thermal distribution are investigated, respectively. On the basis of the design and equations, the METCB samples have been manufactured using a planar deposition technique with an e-beam evaporator. Two in-site experiments are then conducted to sequentially figure out the upper voltage limit of the inner electric circuit and the maximum temperature limit of the METCB. Finally, another experiment is carried out to explore the relation between the applied voltage and the relative twisting angle of the METCB sample. The theoretical prediction and the observed experiment result both prove the feasibility of the proposed METCB and its electro-controllable twisting ability.

Original languageEnglish
Article number065010
JournalJournal of Micromechanics and Microengineering
Volume31
Issue number6
DOIs
StatePublished - Jun 2021

Keywords

  • electro-thermo-mechanical model
  • inner electric circuit
  • micro cantilever beam
  • twisting ability

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