TY - JOUR
T1 - Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability
AU - Su, Xiaoyu
AU - Ren, Zhongjing
AU - Pan, Quan
AU - Lu, Ming
AU - Camino, Fernando
AU - Shi, Yong
N1 - Publisher Copyright:
© 2021 IOP Publishing Ltd.
PY - 2021/6
Y1 - 2021/6
N2 - The structure design of micro cantilever beams(MCBs), which has a significant effect on MCBs' controllable actuation range, is usually restricted by the establishment of the inner electric circuit. This paper proposes the design of a micro electro-controllable twisting cantilever beam (METCB). The architecture and the fabrication diagram of the proposed METCB are presented before its features are theoretically and experimentally validated. In detail, the analytical validation includes a sequence of two models: electro-thermal and thermo-mechanical. Through these two models, the thermal distribution along the METCB and the deformation brought by the thermal distribution are investigated, respectively. On the basis of the design and equations, the METCB samples have been manufactured using a planar deposition technique with an e-beam evaporator. Two in-site experiments are then conducted to sequentially figure out the upper voltage limit of the inner electric circuit and the maximum temperature limit of the METCB. Finally, another experiment is carried out to explore the relation between the applied voltage and the relative twisting angle of the METCB sample. The theoretical prediction and the observed experiment result both prove the feasibility of the proposed METCB and its electro-controllable twisting ability.
AB - The structure design of micro cantilever beams(MCBs), which has a significant effect on MCBs' controllable actuation range, is usually restricted by the establishment of the inner electric circuit. This paper proposes the design of a micro electro-controllable twisting cantilever beam (METCB). The architecture and the fabrication diagram of the proposed METCB are presented before its features are theoretically and experimentally validated. In detail, the analytical validation includes a sequence of two models: electro-thermal and thermo-mechanical. Through these two models, the thermal distribution along the METCB and the deformation brought by the thermal distribution are investigated, respectively. On the basis of the design and equations, the METCB samples have been manufactured using a planar deposition technique with an e-beam evaporator. Two in-site experiments are then conducted to sequentially figure out the upper voltage limit of the inner electric circuit and the maximum temperature limit of the METCB. Finally, another experiment is carried out to explore the relation between the applied voltage and the relative twisting angle of the METCB sample. The theoretical prediction and the observed experiment result both prove the feasibility of the proposed METCB and its electro-controllable twisting ability.
KW - electro-thermo-mechanical model
KW - inner electric circuit
KW - micro cantilever beam
KW - twisting ability
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U2 - 10.1088/1361-6439/abfc35
DO - 10.1088/1361-6439/abfc35
M3 - Article
AN - SCOPUS:85106552695
SN - 0960-1317
VL - 31
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 6
M1 - 065010
ER -