Detection of SiH2 in silane and disilane glow discharges by frequency modulation absorption spectroscopy

J. M. Jasinski, E. A. Whittaker, G. C. Bjorklund, R. W. Dreyfus, R. D. Estes, R. E. Walkup

Research output: Contribution to journalArticlepeer-review

44 Scopus citations

Abstract

The reactive species SiH2 has been directly observed in dc glow discharges using the technique of frequency modulation absorption spectroscopy. The spatial distribution of SiH2 in the discharge and the relative amounts of SiH2 in silane and disilane discharges have been measured.

Original languageEnglish
Pages (from-to)1155-1157
Number of pages3
JournalApplied Physics Letters
Volume44
Issue number12
DOIs
StatePublished - 1984

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