Detection of SiH2 in silane and disilane glow discharges by frequency modulation absorption spectroscopy
- J. M. Jasinski
- , E. A. Whittaker
- , G. C. Bjorklund
- , R. W. Dreyfus
- , R. D. Estes
- , R. E. Walkup
Research output: Contribution to journal › Article › peer-review
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