TY - GEN
T1 - Development of latching type large vertical-travel microactuator
AU - Toda, Risaku
AU - Yang, Eui Hyeok
PY - 2006
Y1 - 2006
N2 - This paper describes design, fabrication and preliminary characterization of a proof-of-conccpt vertical-travel microactuator, providing linear motion and high precision positioning in space. The microactuator is capable of providing latching function when it is un-powered to maintain its position. The microactuator consists of two opposing comb drive actuator dies, a slider and bulk PZT actuators sandwiched between the dies. The slider is inserted between clutches. Comb drives are connected to the clutches to engage/disengage clutching. Sequential activation of the comb drives (in-plane motion) and the PZT actuator (out-of-plane motion) provides cumulative linear travel of the slider. The novelty of the slider insertion approach include (1) post-fabrication engagement of comb teeth enabling thick wafer DRIE process for comb drive actuators and (2) stressed tethers enabling zero-power latching. A test device was fabricated and assembled. By applying 100V-300V DC to the electrostatic comb drive, lateral actuation of clutches was observed. Vertical actuation by PZT was also confirmed using WYKO RST plus interferometer.
AB - This paper describes design, fabrication and preliminary characterization of a proof-of-conccpt vertical-travel microactuator, providing linear motion and high precision positioning in space. The microactuator is capable of providing latching function when it is un-powered to maintain its position. The microactuator consists of two opposing comb drive actuator dies, a slider and bulk PZT actuators sandwiched between the dies. The slider is inserted between clutches. Comb drives are connected to the clutches to engage/disengage clutching. Sequential activation of the comb drives (in-plane motion) and the PZT actuator (out-of-plane motion) provides cumulative linear travel of the slider. The novelty of the slider insertion approach include (1) post-fabrication engagement of comb teeth enabling thick wafer DRIE process for comb drive actuators and (2) stressed tethers enabling zero-power latching. A test device was fabricated and assembled. By applying 100V-300V DC to the electrostatic comb drive, lateral actuation of clutches was observed. Vertical actuation by PZT was also confirmed using WYKO RST plus interferometer.
UR - http://www.scopus.com/inward/record.url?scp=32844470355&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=32844470355&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:32844470355
SN - 0791842002
SN - 9780791842003
T3 - Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005
SP - 1755
EP - 1759
BT - Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems
T2 - ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005
Y2 - 17 July 2005 through 22 July 2005
ER -