Development of MEMS-based piezoelectric microvalve technologies

Engineering

• Piezoelectric 100%
• Development 100%
• Microelectromechanical System 100%
• Silicon 100%
• Leak Rate 100%
• Pressure Drop 100%
• Flow Rate 100%
• Inlet Pressure 100%
• Electric Power Utilization 100%
• Compressible Flow 100%
• Contact Area 50%
• Forwarder 50%
• Flow Model 50%
• Correlation 50%
• Applications 50%
• Water 50%
• Actuators 50%
• Mach Number 50%
• Friction 50%
• Density 50%
• Testing 50%
• Seals 50%
• Flow Proportional Control 50%
• Tensiles 50%
• Piezoelectric Stack 50%
• Housing 50%
• Spacecraft 50%
• Seat Configuration 50%
• Assembly 50%
• Computational Fluid Dynamics 50%
• Applied Voltage 50%
• Small Increase 50%
• Static Pressure 50%
• Dimensional Modeling 50%

Earth and Planetary Sciences

• Science and Technology 100%
• Surface Pressure 80%
• Liquid 80%
• Rate 60%
• Valve 60%
• Gas 40%
• Flow Velocity 40%
• Edge 40%
• Silicon 40%
• Consumption 40%
• Modeling 20%
• Model 20%
• State 20%
• Variation 20%
• Electric Potential 20%
• Utilization 20%
• Area 20%
• Actuator 20%
• Correlation 20%
• Water 20%
• Increasing 20%
• Coefficient 20%
• Statics 20%
• Custom 20%
• Loss 20%
• Summary 20%
• Contrast 20%
• Amount 20%
• Package 20%
• Metal 20%
• Spacecraft 20%
• Computational Modeling 20%
• Friction 20%
• Propellant 20%
• Leakage 20%
• Fluid Dynamics 20%

Physics

• Pressure 100%
• Piezoelectricity 100%
• Technology 100%
• Liquids 66%
• Gaseous State 33%
• Silicon 33%
• Flow Velocity 33%
• Gaps 33%
• Variations 16%
• Statics 16%
• Coefficients 16%
• Flow Control 16%
• Model 16%
• Utilization 16%
• Electric Potential 16%
• Water 16%
• Correlation 16%
• Increasing 16%
• Contrast 16%
• Helium 16%
• Propellant 16%
• Computational Fluid Dynamics 16%
• Metal 16%
• Mach Number 16%
• Static Pressure 16%
• Friction 16%