TY - GEN
T1 - Dielectric charging and thermally activated processes in MEMS capacitive switches
AU - Papaioannou, George
AU - Tavasolian, Negar
AU - Goldsmith, Charles
AU - Papapolymerou, John
PY - 2009
Y1 - 2009
N2 - The paper investigates dielectric charging effects for capacitive RF MEMS switches with SiO2 as the dielectric material. Two different actuation schemes are implemented in order to incorporate and better understand the charging history over time. Experimental results indicate that regardless of the actuation scheme the charging is thermally in principle, and that the activation energy decreases as the voltage sweep rate increases.
AB - The paper investigates dielectric charging effects for capacitive RF MEMS switches with SiO2 as the dielectric material. Two different actuation schemes are implemented in order to incorporate and better understand the charging history over time. Experimental results indicate that regardless of the actuation scheme the charging is thermally in principle, and that the activation energy decreases as the voltage sweep rate increases.
UR - http://www.scopus.com/inward/record.url?scp=72449188087&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=72449188087&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:72449188087
SN - 9782874870125
T3 - European Microwave Week 2009, EuMW 2009: Science, Progress and Quality at Radiofrequencies, Conference Proceedings - 4th European Microwave Integrated Circuits Conference, EuMIC 2009
SP - 399
EP - 402
BT - European Microwave Week 2009, EuMW 2009
T2 - European Microwave Week 2009, EuMW 2009: Science, Progress and Quality at Radiofrequencies - 4th European Microwave Integrated Circuits Conference, EuMIC 2009
Y2 - 28 September 2009 through 2 October 2009
ER -