@inproceedings{6ea0d688bb7b49c1b2f5da649eed4e45,
title = "Dielectric charging in capacitive RF MEMS switches: The effect of electric stress",
abstract = "This paper investigates the dependence of dielectric charging on the pull-in state electric field and temperature in capacitive RF MEMS switches with silicon dioxide as the dielectric material. Electric field intensities determined by bias levels extending from 0% to 50% above pull-in voltage are employed. Experimental results indicate that charging is thermally activated and the activation energy increases with increasing the intensity of the pull-in state electric field. These results provide a deeper insight to the trapping processes in dielectric materials under different levels of electric stress and aid in better modeling of charging processes in capacitive RF MEMS switches.",
keywords = "Capacitive switches, RF MEMS, dielectric charging, electric stress",
author = "Negar Tavassolian and Matroni Koutsoureli and George Papaioannou and Benjamin Lacroix and John Papapolymerou",
year = "2010",
language = "English",
isbn = "9784902339222",
series = "Asia-Pacific Microwave Conference Proceedings, APMC",
pages = "1833--1836",
booktitle = "2010 Asia-Pacific Microwave Conference Proceedings, APMC 2010",
note = "2010 Asia-Pacific Microwave Conference, APMC 2010 ; Conference date: 07-12-2010 Through 10-12-2010",
}