@inproceedings{24144742e30b410691a28ab0cba1a498,
title = "Diode laser spectroscopy for plasma processing diagnostics",
author = "Sun, {H. C.} and Whittaker, {E. A.}",
year = "1990",
doi = "10.1109/LEOS.1990.690683",
language = "English",
series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",
pages = "577--578",
booktitle = "LEOS 1990 - IEEE Lasers and Electro-Optics Society Annual Meeting, Conference Proceedings",
note = "3rd IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS 1990 ; Conference date: 04-11-1990 Through 09-11-1990",
}