Diode laser spectroscopy for plasma processing diagnostics

H. C. Sun, E. A. Whittaker

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations
Original languageEnglish
Title of host publicationLEOS 1990 - IEEE Lasers and Electro-Optics Society Annual Meeting, Conference Proceedings
Pages577-578
Number of pages2
ISBN (Electronic)0879425504
DOIs
StatePublished - 1990
Event3rd IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS 1990 - Boston, United States
Duration: 4 Nov 19909 Nov 1990

Publication series

NameConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume1990-November
ISSN (Print)1092-8081

Conference

Conference3rd IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS 1990
Country/TerritoryUnited States
CityBoston
Period4/11/909/11/90

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