Dynamic Characteristics of the Corrugated and the Flat p+ Diaphragms Actuated Electrostatically under Residual Stress

E. H. Yang, S. S. Yang, E. J. Park, S. H. Yoo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents the dynamic characteristics of a corrugated p+ diaphragm and a flat one actuated electrostatically under residual stress. The numerical calculations of the dynamic characteristics of the diaphragms under the residual stress and damping have been performed using the general purpose finite element simulation program, ABAQUS. The velocity responses of the center of the diaphragms actuated electrostatically have been measured using a laser vibrometer. The test results are compared with the calculation results under tensile residual stress. For the corrugated diaphragm, the measured deflection coincides with the calculation result under the tensile residual stress of 100 MPa and the damping coefficient of 5, and for the flat one, under the tensile residual stress of 40 MPa and the damping coefficient of 500.

Original languageEnglish
Title of host publicationMicroelectromechanical Systems (MEMS)
Pages441-445
Number of pages5
ISBN (Electronic)9780791815410
DOIs
StatePublished - 1996
EventASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996 - Atlanta, United States
Duration: 17 Nov 199622 Nov 1996

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume1996-U

Conference

ConferenceASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996
Country/TerritoryUnited States
CityAtlanta
Period17/11/9622/11/96

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