TY - GEN
T1 - Dynamic Characteristics of the Corrugated and the Flat p+ Diaphragms Actuated Electrostatically under Residual Stress
AU - Yang, E. H.
AU - Yang, S. S.
AU - Park, E. J.
AU - Yoo, S. H.
N1 - Publisher Copyright:
© 1996 American Society of Mechanical Engineers (ASME). All rights reserved.
PY - 1996
Y1 - 1996
N2 - This paper presents the dynamic characteristics of a corrugated p+ diaphragm and a flat one actuated electrostatically under residual stress. The numerical calculations of the dynamic characteristics of the diaphragms under the residual stress and damping have been performed using the general purpose finite element simulation program, ABAQUS. The velocity responses of the center of the diaphragms actuated electrostatically have been measured using a laser vibrometer. The test results are compared with the calculation results under tensile residual stress. For the corrugated diaphragm, the measured deflection coincides with the calculation result under the tensile residual stress of 100 MPa and the damping coefficient of 5, and for the flat one, under the tensile residual stress of 40 MPa and the damping coefficient of 500.
AB - This paper presents the dynamic characteristics of a corrugated p+ diaphragm and a flat one actuated electrostatically under residual stress. The numerical calculations of the dynamic characteristics of the diaphragms under the residual stress and damping have been performed using the general purpose finite element simulation program, ABAQUS. The velocity responses of the center of the diaphragms actuated electrostatically have been measured using a laser vibrometer. The test results are compared with the calculation results under tensile residual stress. For the corrugated diaphragm, the measured deflection coincides with the calculation result under the tensile residual stress of 100 MPa and the damping coefficient of 5, and for the flat one, under the tensile residual stress of 40 MPa and the damping coefficient of 500.
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U2 - 10.1115/IMECE1996-1387
DO - 10.1115/IMECE1996-1387
M3 - Conference contribution
AN - SCOPUS:85169568836
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 441
EP - 445
BT - Microelectromechanical Systems (MEMS)
T2 - ASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996
Y2 - 17 November 1996 through 22 November 1996
ER -