Dynamic characteristics of the corrugated and the flat p+ diaphragms actuated electrostatically under residual stress

This paper presents the dynamic characteristics of a corrugated p+ diaphragm and a flat one actuated electrostatically under residual stress. The numerical calculations of the dynamic characteristics of the diaphragms under the residual stress and damping have been performed using the general purpose finite element simulation program, ABAQUS. The velocity responses of the center of the diaphragms actuated electrostatically have been measured using a laser vibrometer. The test results are compared with the calculation results under tensile residual stress. For the corrugated diaphragm, the measured deflection coincides with the calculation result under the tensile residual stress of 100 MPa and the damping coefficient of 5, and for the flat one, under the tensile residual stress of 40 MPa and the damping coefficient of 500.