TY - JOUR
T1 - Effects of oxygen partial pressure on the nucleation behavior and morphology of chemically-vapor-deposited zirconia on Hi-Nicalon fiber and Si
AU - Lee, Jinil
AU - Li, Hao
AU - Lee, Woo Y.
AU - Lance, Michael J.
PY - 2003/12
Y1 - 2003/12
N2 - A ZrO2 coating was prepared on Hi-Nicalon fiber and single-crystal Si by chemical vapor deposition (CVD) using ZrCl4, CO2, and H2 as precursors at 1050°C. The effects of oxygen partial pressure on the nucleation behavior of the CVD-ZrO2 coating were systematically studied by intentionally varying the controlled amount of O2 into the CVD chamber. Characterization results suggested that the number density of tetragonal ZrO2 nuclei apparently decreased with increasing the oxygen partial pressure from 4 × 10-3 to 1.6 Pa. Also, the coating layer became more columnar and contained larger monoclinic ZrO2 grains. The observed relationships between the oxygen partial pressure and the nucleation and morphologic characteristics of the ZrO2 coating were attributed to the grain size and oxygen deficiency effects, which have been previously reported to cause the stabilization of the tetragonal ZrO2 phase in bulk ZrO2 specimens.
AB - A ZrO2 coating was prepared on Hi-Nicalon fiber and single-crystal Si by chemical vapor deposition (CVD) using ZrCl4, CO2, and H2 as precursors at 1050°C. The effects of oxygen partial pressure on the nucleation behavior of the CVD-ZrO2 coating were systematically studied by intentionally varying the controlled amount of O2 into the CVD chamber. Characterization results suggested that the number density of tetragonal ZrO2 nuclei apparently decreased with increasing the oxygen partial pressure from 4 × 10-3 to 1.6 Pa. Also, the coating layer became more columnar and contained larger monoclinic ZrO2 grains. The observed relationships between the oxygen partial pressure and the nucleation and morphologic characteristics of the ZrO2 coating were attributed to the grain size and oxygen deficiency effects, which have been previously reported to cause the stabilization of the tetragonal ZrO2 phase in bulk ZrO2 specimens.
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U2 - 10.1111/j.1151-2916.2003.tb03604.x
DO - 10.1111/j.1151-2916.2003.tb03604.x
M3 - Article
AN - SCOPUS:0346936229
SN - 0002-7820
VL - 86
SP - 2031
EP - 2036
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
IS - 12
ER -