Effects of Temperature and Reagent Concentration on the Morphology of Chemically Vapor Deposited β‐Ta2O5

Yong W. Bae, Woo Y. Lee, David P. Stinton

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

Crystalline β‐Ta2O5 coatings were deposited on hot‐isostatically‐pressed Si3N4 by reacting TaCl5 with H2 and CO2 in the temperature range of 1000°–1300°C and at a pressure of 660 Pa. The Ta2O5 coatings generally consisted of wellcoalesced 2–3 μm grains, resulting in the formation of a nonporous coating morphology. However, the presence of microcracks on the as‐deposited surface was consistently observed. The surface morphology, texture, and growth rate of the coatings were examined as a function of deposition parameters.

Original languageEnglish
Pages (from-to)1297-1300
Number of pages4
JournalJournal of the American Ceramic Society
Volume78
Issue number5
DOIs
StatePublished - May 1995

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