TY - JOUR
T1 - Effects of Temperature and Reagent Concentration on the Morphology of Chemically Vapor Deposited β‐Ta2O5
AU - Bae, Yong W.
AU - Lee, Woo Y.
AU - Stinton, David P.
PY - 1995/5
Y1 - 1995/5
N2 - Crystalline β‐Ta2O5 coatings were deposited on hot‐isostatically‐pressed Si3N4 by reacting TaCl5 with H2 and CO2 in the temperature range of 1000°–1300°C and at a pressure of 660 Pa. The Ta2O5 coatings generally consisted of wellcoalesced 2–3 μm grains, resulting in the formation of a nonporous coating morphology. However, the presence of microcracks on the as‐deposited surface was consistently observed. The surface morphology, texture, and growth rate of the coatings were examined as a function of deposition parameters.
AB - Crystalline β‐Ta2O5 coatings were deposited on hot‐isostatically‐pressed Si3N4 by reacting TaCl5 with H2 and CO2 in the temperature range of 1000°–1300°C and at a pressure of 660 Pa. The Ta2O5 coatings generally consisted of wellcoalesced 2–3 μm grains, resulting in the formation of a nonporous coating morphology. However, the presence of microcracks on the as‐deposited surface was consistently observed. The surface morphology, texture, and growth rate of the coatings were examined as a function of deposition parameters.
UR - http://www.scopus.com/inward/record.url?scp=84986412980&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84986412980&partnerID=8YFLogxK
U2 - 10.1111/j.1151-2916.1995.tb08485.x
DO - 10.1111/j.1151-2916.1995.tb08485.x
M3 - Article
AN - SCOPUS:84986412980
SN - 0002-7820
VL - 78
SP - 1297
EP - 1300
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
IS - 5
ER -