Equilibrium and stability of micro-cantilevers used in atomic force microscopy

Jean W. Zu, Gong Cheng, Qian Tang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

The equilibrium states and their stability of micro-cantilevers used in the AFM under the noncontact and contact mode operations are studied with the energy method. The focus of the study is laid on the influence of the length of the micro-cantilever as well as its working distance from the sample surface upon the system's equilibrium state. The findings from this study can provide useful guidance to the design of micro-cantilevers in the AFM.

Original languageEnglish
Title of host publicationProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
EditorsW. Badawy, W. Moussa
Pages537-540
Number of pages4
StatePublished - 2004
EventProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004 - Banff, Alta., Canada
Duration: 25 Aug 200427 Aug 2004

Publication series

NameProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004

Conference

ConferenceProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
Country/TerritoryCanada
CityBanff, Alta.
Period25/08/0427/08/04

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