Fabrication and characterization of vertical travel linear microactuator

Risaku Toda, Eui Hyeok Yang

Research output: Contribution to journalConference articlepeer-review

Abstract

This paper describes design, fabrication and characterization of a proof-of-concept vertical travel linear microactuator designed to provide out-of-plane actuation for high precision positioning applications in space. The microactuator is designed to achieve vertical actuation travel by incorporating compliant beam structures within a SOI (Silicon on Insulator) wafer. Device structure except for the piezoelectric actuator is fabricated on the SOI wafer using Deep Reactive Ion Etch (DRIE) process. Incremental travel distance of the piezoelectric actuator is adjustable at nanometer level by controlling voltage. Bistable beam geometry is employed to minimize initial gaps between electrodes. The footprint of an actuator is approximately 2 mm × 4 mm. Actuation is characterized with LabVIEW-based test bed. Actuation voltage sequence is generated by the Lab VIEW controlled power relays. Vertical actuation in the range of 500 nm over 10-cycle was observed using WYKO RST Plus Optical Profiler.

Original languageEnglish
Article number02
Pages (from-to)14-20
Number of pages7
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume5717
DOIs
StatePublished - 2005
EventMEMS/MOEMS Components and Their Applications II - San Jose, CA, United States
Duration: 24 Jan 200525 Jan 2005

Keywords

  • Actuator
  • Bistable beam
  • Electrostatic
  • Piezoelectric

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