TY - JOUR
T1 - Fabrication and characterization of vertical travel linear microactuator
AU - Toda, Risaku
AU - Yang, Eui Hyeok
PY - 2004
Y1 - 2004
N2 - This paper describes design, fabrication and characterization of a proof-of-concept vertical travel linear microactuator designed to provide out-of-plane actuation for high precision positioning applications in space. The microactuator is designed to achieve vertical actuation travel by incorporating compliant beam structures within a SOI (Silicon on Insulator) wafer. Device structure except for the piezoelectric actuator is fabricated on the SOI wafer using Deep Reactive Ion Etch (DRIE) process. Incremental travel distance of the piezoelectric actuator is adjustable at nanometer level by controlling voltage. Bistable beam geometry is employed to minimize initial gaps between electrodes. The footprint of an actuator is approximately 2 mm × 4 mm. Actuation is characterized with LabVIEW-based test bed. Actuation voltage sequence is generated by the LabVIEW controlled power relays. Vertical actuation in the range of 500 nm over 10-cycle was observed using WYKO RST Plus Optical Profiler.
AB - This paper describes design, fabrication and characterization of a proof-of-concept vertical travel linear microactuator designed to provide out-of-plane actuation for high precision positioning applications in space. The microactuator is designed to achieve vertical actuation travel by incorporating compliant beam structures within a SOI (Silicon on Insulator) wafer. Device structure except for the piezoelectric actuator is fabricated on the SOI wafer using Deep Reactive Ion Etch (DRIE) process. Incremental travel distance of the piezoelectric actuator is adjustable at nanometer level by controlling voltage. Bistable beam geometry is employed to minimize initial gaps between electrodes. The footprint of an actuator is approximately 2 mm × 4 mm. Actuation is characterized with LabVIEW-based test bed. Actuation voltage sequence is generated by the LabVIEW controlled power relays. Vertical actuation in the range of 500 nm over 10-cycle was observed using WYKO RST Plus Optical Profiler.
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U2 - 10.1115/IMECE2004-59911
DO - 10.1115/IMECE2004-59911
M3 - Conference article
AN - SCOPUS:21644432349
SN - 1096-665X
SP - 159
EP - 163
JO - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
JF - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
M1 - IMECE2004-59911
T2 - 2004 ASME International Mechanical Engineering Congress and Exposition, IMECE
Y2 - 13 November 2004 through 19 November 2004
ER -