TY - JOUR
T1 - Fabrication and dynamic testing of electrostatic actuators with p+ silicon diaphragms
AU - Yang, E. H.
AU - Yang, S. S.
AU - Han, S. W.
AU - Kim, S. Y.
PY - 1995
Y1 - 1995
N2 - This paper presents the fabrication and testing of electrostatic actuators with p+ diaphragms. The actuators consist of two counter electrodes which are fabricated on a silicon wafer and Pyrex glass, respectively. The p+ diaphragm is used as a moving electrode, whereas the aluminium layer deposited on #7740 Pyrex glass is used as a fixed electrode. According to the calculation of static deflection of diaphragms with residual tensile stress, corrugated diaphragms deflect more than a flat one in most deflection regions. The dynamic characteristics of an actuator with a corrugated diaphragm and one with a flat diaphragm are tested and compared with the calculation results.
AB - This paper presents the fabrication and testing of electrostatic actuators with p+ diaphragms. The actuators consist of two counter electrodes which are fabricated on a silicon wafer and Pyrex glass, respectively. The p+ diaphragm is used as a moving electrode, whereas the aluminium layer deposited on #7740 Pyrex glass is used as a fixed electrode. According to the calculation of static deflection of diaphragms with residual tensile stress, corrugated diaphragms deflect more than a flat one in most deflection regions. The dynamic characteristics of an actuator with a corrugated diaphragm and one with a flat diaphragm are tested and compared with the calculation results.
KW - Corrugated diaphragms
KW - Dynamic testing
KW - Electrostatic actuators
KW - Residual stress
KW - p Diaphragms
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U2 - 10.1016/0924-4247(96)80100-2
DO - 10.1016/0924-4247(96)80100-2
M3 - Article
AN - SCOPUS:0029350664
SN - 0924-4247
VL - 50
SP - 151
EP - 156
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 1-2
ER -