Fabrication and dynamic testing of electrostatic actuators with p+ silicon diaphragms

E. H. Yang, S. S. Yang, S. W. Han, S. Y. Kim

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

This paper presents the fabrication and testing of electrostatic actuators with p+ diaphragms. The actuators consist of two counter electrodes which are fabricated on a silicon wafer and Pyrex glass, respectively. The p+ diaphragm is used as a moving electrode, whereas the aluminium layer deposited on #7740 Pyrex glass is used as a fixed electrode. According to the calculation of static deflection of diaphragms with residual tensile stress, corrugated diaphragms deflect more than a flat one in most deflection regions. The dynamic characteristics of an actuator with a corrugated diaphragm and one with a flat diaphragm are tested and compared with the calculation results.

Original languageEnglish
Pages (from-to)151-156
Number of pages6
JournalSensors and Actuators, A: Physical
Volume50
Issue number1-2
DOIs
StatePublished - 1995

Keywords

  • Corrugated diaphragms
  • Dynamic testing
  • Electrostatic actuators
  • Residual stress
  • p Diaphragms

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