Fabrication and dynamic testing of electrostatic actuators with p+ silicon diaphragms

E. H. Yang, S. S. Yang, S. W. Han, S. Y. Kim

Research output: Contribution to conferencePaperpeer-review

Abstract

This paper presents the fabrication and testing of electrostatic actuators. The p+ diaphragm is used as a moving electrode, whereas the aluminum layer deposited on a #7740 pyrex glass is used as a fixed electrode. The dynamic characteristics of the actuator with the corrugated diaphragm and that with the flat one are tested and compared with the calculation results, respectively.

Original languageEnglish
Pages28-31
Number of pages4
StatePublished - 1995
EventProceedings of the 1995 IEEE Region 10 International Conference on Microelectronics and VLSI, TENCON'95 - Hong Kong, Hong Kong
Duration: 6 Nov 199510 Nov 1995

Conference

ConferenceProceedings of the 1995 IEEE Region 10 International Conference on Microelectronics and VLSI, TENCON'95
CityHong Kong, Hong Kong
Period6/11/9510/11/95

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