Abstract
This paper presents the fabrication and testing of electrostatic actuators. The p+ diaphragm is used as a moving electrode, whereas the aluminum layer deposited on a #7740 pyrex glass is used as a fixed electrode. The dynamic characteristics of the actuator with the corrugated diaphragm and that with the flat one are tested and compared with the calculation results, respectively.
Original language | English |
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Pages | 28-31 |
Number of pages | 4 |
State | Published - 1995 |
Event | Proceedings of the 1995 IEEE Region 10 International Conference on Microelectronics and VLSI, TENCON'95 - Hong Kong, Hong Kong Duration: 6 Nov 1995 → 10 Nov 1995 |
Conference
Conference | Proceedings of the 1995 IEEE Region 10 International Conference on Microelectronics and VLSI, TENCON'95 |
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City | Hong Kong, Hong Kong |
Period | 6/11/95 → 10/11/95 |