TY - JOUR
T1 - Fabrication and electrostatic actuation of thin diaphragms
AU - Yang, E. H.
PY - 1998
Y1 - 1998
N2 - In this paper, two kinds of p+ diaphragms are fabricated. One is flat, and the other is corrugated to release the residual stress resulted from the diffusion process. The two diaphragms are electrostatically actuated, and the center deflections of the diaphragms are measured for various frequencies. The static deflections of the flat diaphragm and the corrugated one estimated from the test results are compared with the calculated static deflections under residual tensile stress. The experimental result and the calculated result agree in the case of the flat diaphragm with a reasonable residual stress, but it is not true for the corrugated diaphragm. In the calculation, it is estimated that the corrugated diaphragm deflects more than the flat one. In the experiment, however, the corrugated diaphragm deflects less than the flat one.
AB - In this paper, two kinds of p+ diaphragms are fabricated. One is flat, and the other is corrugated to release the residual stress resulted from the diffusion process. The two diaphragms are electrostatically actuated, and the center deflections of the diaphragms are measured for various frequencies. The static deflections of the flat diaphragm and the corrugated one estimated from the test results are compared with the calculated static deflections under residual tensile stress. The experimental result and the calculated result agree in the case of the flat diaphragm with a reasonable residual stress, but it is not true for the corrugated diaphragm. In the calculation, it is estimated that the corrugated diaphragm deflects more than the flat one. In the experiment, however, the corrugated diaphragm deflects less than the flat one.
KW - Corrugated Diaphragm
KW - Damping
KW - Dynamic Testing
KW - Electrostatic Actuation
KW - P Diaphragm
KW - Residual Stress
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U2 - 10.1007/BF02947160
DO - 10.1007/BF02947160
M3 - Article
AN - SCOPUS:0003371071
SN - 1226-4865
VL - 12
SP - 161
EP - 169
JO - KSME International Journal
JF - KSME International Journal
IS - 2
ER -