TY - JOUR
T1 - Fabrication and testing of a pair of passive bivalvular microvalves composed of p + silicon diaphragms
AU - Yang, Eui Hyeok
AU - Han, Sang Woo
AU - Yang, Sang Sik
PY - 1996/10
Y1 - 1996/10
N2 - A pair of one-way passive microvalves is fabricated by using the p + etch-stop method. The two valves have a simple structure and are easy to fabricate. Each valve consists of several p + silicon diaphragms and is designed to open and close depending on the pressure difference. The fabrication process of the valves consists of a boron diffusion and simple anisotropic etch processes. According to the experimental results, the water flow rate is 1.6 ml min-1 at 4 kPa of forward pressure and -0.05 ml min-1 at 4 kPa of backward pressure.
AB - A pair of one-way passive microvalves is fabricated by using the p + etch-stop method. The two valves have a simple structure and are easy to fabricate. Each valve consists of several p + silicon diaphragms and is designed to open and close depending on the pressure difference. The fabrication process of the valves consists of a boron diffusion and simple anisotropic etch processes. According to the experimental results, the water flow rate is 1.6 ml min-1 at 4 kPa of forward pressure and -0.05 ml min-1 at 4 kPa of backward pressure.
KW - Etch-stop method; p + silicon film
KW - Passive bivalvular microvalves
KW - Static flow testing
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U2 - 10.1016/S0924-4247(97)80097-0
DO - 10.1016/S0924-4247(97)80097-0
M3 - Article
AN - SCOPUS:0030264714
SN - 0924-4247
VL - 57
SP - 75
EP - 78
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 1
ER -