@inproceedings{02531f434a94416a86200c0b218a4ac3,
title = "Fabrication of 20 nm embedded longitudinal nanochannels transferred from metal nanowire patterns",
abstract = "In this paper, we propose a technique of fabricating nanometer-scale channels embedded by dielectric materials. Longitudinal {"}embedded{"} nanochannels with an opening size 20 nm × 80 nm have been successfully fabricated on silicon wafer by sacrificial etching nanowire structures.",
keywords = "Focused ion beam, Nanochannels, Sacrificial etching",
author = "Choi, {Daniel S.} and Yang, {Eui Hyeok}",
year = "2003",
language = "English",
isbn = "0972842209",
series = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
pages = "59--61",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
note = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003 ; Conference date: 23-02-2003 Through 27-02-2003",
}