Fabrication of an electrostatic actuator and passive valves with p+ diaphragms for micropumps

S. S. Yang, E. H. Yang, J. D. Seo, S. Y. Kim, S. H. Yoo

Research output: Contribution to conferencePaperpeer-review

2 Scopus citations

Abstract

An electrostatic silicon microactuator with a corrugated p+ diaphragm as an electrode is fabricated. Two one-way passive valves are fabricated on either side of a single silicon wafer by p+ etch-stop method. The fabricated electrostatic actuator and the passive valve are tested independently. The peak velocity amplitude of the center of the diaphragm for the input voltage of 67 V, is about 8.5 mm/s at 20 kHz. The water flow rate is 2 ml/min at 0.1 bar of the forward pressure. The test results of the actuator and the valve are compared with the simulation results of those, respectively.

Original languageEnglish
Pages733-740
Number of pages8
StatePublished - 1994
EventProceedings of the 1994 International Mechanical Engineering Congress and Exposition - Chicago, IL, USA
Duration: 6 Nov 199411 Nov 1994

Conference

ConferenceProceedings of the 1994 International Mechanical Engineering Congress and Exposition
CityChicago, IL, USA
Period6/11/9411/11/94

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