Fabrication of an electrostatic actuator and passive valves with p⁺ diaphragms for micropumps

An electrostatic silicon microactuator with a corrugated p⁺ diaphragm as an electrode is fabricated. Two one-way passive valves are fabricated on either side of a single silicon wafer by p⁺ etch-stop method. The fabricated electrostatic actuator and the passive valve are tested independently. The peak velocity amplitude of the center of the diaphragm for the input voltage of 67 V, is about 8.5 mm/s at 20 kHz. The water flow rate is 2 ml/min at 0.1 bar of the forward pressure. The test results of the actuator and the valve are compared with the simulation results of those, respectively.