TY - GEN
T1 - Fabrication of ito nanofibers as gas sensor
AU - Xu, Shiyou
AU - Shi, Yong
N1 - Publisher Copyright:
Copyright © 2007 by ASME.
PY - 2007
Y1 - 2007
N2 - This paper presents the fabrication of ITO nanofibers as gas sensor. ITO nanofibers are fabricated by electrospinning process. Sensors based on ITO nanofibers were prepared on Si substrate and silver paste was used as electrode. The morphology and crystal structure of ITO nanofibers were studied by SEM and XRD, respectively. The optimal working temperature and sensitivity of ITO nanofiber sensors were investigated. The sensitivity of ITO nanofiber sensor has been found to increase to a peak of 9.8 at 160°C for 50 ppm NO2, which suggests that ITO nanofibers sensor provides significantly better sensitivity for NO2 at lower temperature.
AB - This paper presents the fabrication of ITO nanofibers as gas sensor. ITO nanofibers are fabricated by electrospinning process. Sensors based on ITO nanofibers were prepared on Si substrate and silver paste was used as electrode. The morphology and crystal structure of ITO nanofibers were studied by SEM and XRD, respectively. The optimal working temperature and sensitivity of ITO nanofiber sensors were investigated. The sensitivity of ITO nanofiber sensor has been found to increase to a peak of 9.8 at 160°C for 50 ppm NO2, which suggests that ITO nanofibers sensor provides significantly better sensitivity for NO2 at lower temperature.
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U2 - 10.1115/IMECE200743857
DO - 10.1115/IMECE200743857
M3 - Conference contribution
AN - SCOPUS:84928635975
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 551
EP - 554
BT - Micro and Nano Systems
T2 - ASME 2007 International Mechanical Engineering Congress and Exposition, IMECE 2007
Y2 - 11 November 2007 through 15 November 2007
ER -