Fabrication of vertically standing metal nanowire arrays on silicon substrates using anodized aluminum oxide (AAO) and polycarbonate (PC) templates

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Abstract

We present a new fabrication method to grow vertically aligned nanowire arrays on a silicon substrate using commercially available anodized aluminum oxide (AAO) and polycarbonate (PC) templates. This technique eliminates the preparation procedure of coating one side of the template with a conductive layer, which is required in most template assisted nanowire growth methods. In this study, vertically aligned nanowires with a high aspect ratio of over 10 were fabricated on silicon substrate by electrodeposition, potentially enabling mass production.

Original languageEnglish
Title of host publicationMicro- and Nanotechnology Sensors, Systems, and Applications
DOIs
StatePublished - 2009
EventMicro- and Nanotechnology Sensors, Systems, and Applications - Orlando, FL, United States
Duration: 15 Apr 200917 Apr 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7318
ISSN (Print)0277-786X

Conference

ConferenceMicro- and Nanotechnology Sensors, Systems, and Applications
Country/TerritoryUnited States
CityOrlando, FL
Period15/04/0917/04/09

Keywords

  • Aligned nanowire
  • Anodized aluminum oxide (AAO) template
  • Electrodeposition
  • Freestanding nanowire
  • Nanowire arrays
  • Nanowire fabrication
  • Polycarbonate (PC) template

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