Fingertip Plethysmography Using A Sensitive Wafer-Level-Packaged Capacitive MEMS Strain Sensor

Xinyu Jiang, Arash Shokouhmand, Negar Ebadi, Farrokh Ayazi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We introduce a highly sensitive out-of-plane capacitive silicon strain sensor designed for wearable health monitoring applications, specifically targeting finger plethysmography. Featuring a compact wafer-level-packaged die size measuring 2.5 mm × 2.2 mm × 0.85 mm, the sensor exhibits a strain sensitivity of 1.1 fF/μϵ in a linear range of 700 μϵ. We demonstrate that fingertip strain plethysmography (SPG), facilitated by this novel device, effectively tracks photo-plethysmography (PPG) recordings that are conventionally used for pulse oximetry. SPG delivers accurate monitoring of heart rate (HR), heart rate variability (HRV), and respiratory rate (RR). It also holds promise for non-invasive continuous measurement of blood pressure (BP) through the application of the pulse transit time (PTT) principle. The high sensitivity of the device enables detection of small physiological strains even after being mounted onto a small PCB board, showcasing great potential for use in challenging wearable health-monitoring platforms.

Original languageEnglish
Title of host publicationIEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
Pages348-351
Number of pages4
ISBN (Electronic)9798350357929
DOIs
StatePublished - 2024
Event37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States
Duration: 21 Jan 202425 Jan 2024

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Country/TerritoryUnited States
CityAustin
Period21/01/2425/01/24

Keywords

  • MEMS Strain Sensor
  • PPG
  • Strain Plethysmography
  • Wearable Sensor

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