TY - GEN
T1 - Fingertip Plethysmography Using A Sensitive Wafer-Level-Packaged Capacitive MEMS Strain Sensor
AU - Jiang, Xinyu
AU - Shokouhmand, Arash
AU - Ebadi, Negar
AU - Ayazi, Farrokh
N1 - Publisher Copyright:
© 2024 IEEE.
PY - 2024
Y1 - 2024
N2 - We introduce a highly sensitive out-of-plane capacitive silicon strain sensor designed for wearable health monitoring applications, specifically targeting finger plethysmography. Featuring a compact wafer-level-packaged die size measuring 2.5 mm × 2.2 mm × 0.85 mm, the sensor exhibits a strain sensitivity of 1.1 fF/μϵ in a linear range of 700 μϵ. We demonstrate that fingertip strain plethysmography (SPG), facilitated by this novel device, effectively tracks photo-plethysmography (PPG) recordings that are conventionally used for pulse oximetry. SPG delivers accurate monitoring of heart rate (HR), heart rate variability (HRV), and respiratory rate (RR). It also holds promise for non-invasive continuous measurement of blood pressure (BP) through the application of the pulse transit time (PTT) principle. The high sensitivity of the device enables detection of small physiological strains even after being mounted onto a small PCB board, showcasing great potential for use in challenging wearable health-monitoring platforms.
AB - We introduce a highly sensitive out-of-plane capacitive silicon strain sensor designed for wearable health monitoring applications, specifically targeting finger plethysmography. Featuring a compact wafer-level-packaged die size measuring 2.5 mm × 2.2 mm × 0.85 mm, the sensor exhibits a strain sensitivity of 1.1 fF/μϵ in a linear range of 700 μϵ. We demonstrate that fingertip strain plethysmography (SPG), facilitated by this novel device, effectively tracks photo-plethysmography (PPG) recordings that are conventionally used for pulse oximetry. SPG delivers accurate monitoring of heart rate (HR), heart rate variability (HRV), and respiratory rate (RR). It also holds promise for non-invasive continuous measurement of blood pressure (BP) through the application of the pulse transit time (PTT) principle. The high sensitivity of the device enables detection of small physiological strains even after being mounted onto a small PCB board, showcasing great potential for use in challenging wearable health-monitoring platforms.
KW - MEMS Strain Sensor
KW - PPG
KW - Strain Plethysmography
KW - Wearable Sensor
UR - http://www.scopus.com/inward/record.url?scp=85186652423&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85186652423&partnerID=8YFLogxK
U2 - 10.1109/MEMS58180.2024.10439370
DO - 10.1109/MEMS58180.2024.10439370
M3 - Conference contribution
AN - SCOPUS:85186652423
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 348
EP - 351
BT - IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
T2 - 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Y2 - 21 January 2024 through 25 January 2024
ER -