High sensitivity, low operational temperature ITO nano gas sensor with integrated circuits

Shiyou Xu, Yong Shi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

this paper presents the gas sensing characteristics of Indium-Tin-Oxide (ITO) nanofibers. ITO nanofibers were fabricated by electrospinning process and integrated with microheater, micro temperature sensor and interdigitaded electrodes (lED). The morphology and crystal structure of ITO nanofibers were studied by SEM and XRD, respectively. The optimal working temperature and sensitivity of the ITO nanofiber gas sensors were investigated. The ITO nanofiber gas sensor exhibits a linear current-voltage relationship. The highest sensitivity of the sensor is about 34, which is obtained at a working temperature of 300°C; and this sensor can also work at room temperature, the sensitivity at room temperature is about 5.2. The detect limitation of this ITO nanofiber sensor is 10ppm. This sensor shows no response for 8 2- These results show that ITO nanofiber gas sensor exhibits significantly better sensitivity for NO2 at lower temperature and good selectivity for NO2 and H2.

Original languageEnglish
Title of host publication4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages690-693
Number of pages4
DOIs
StatePublished - 2009
Event4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China
Duration: 5 Jan 20098 Jan 2009

Publication series

Name4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Conference

Conference4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Country/TerritoryChina
CityShenzhen
Period5/01/098/01/09

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