TY - GEN
T1 - High sensitivity, low operational temperature ITO nano gas sensor with integrated circuits
AU - Xu, Shiyou
AU - Shi, Yong
PY - 2009
Y1 - 2009
N2 - this paper presents the gas sensing characteristics of Indium-Tin-Oxide (ITO) nanofibers. ITO nanofibers were fabricated by electrospinning process and integrated with microheater, micro temperature sensor and interdigitaded electrodes (lED). The morphology and crystal structure of ITO nanofibers were studied by SEM and XRD, respectively. The optimal working temperature and sensitivity of the ITO nanofiber gas sensors were investigated. The ITO nanofiber gas sensor exhibits a linear current-voltage relationship. The highest sensitivity of the sensor is about 34, which is obtained at a working temperature of 300°C; and this sensor can also work at room temperature, the sensitivity at room temperature is about 5.2. The detect limitation of this ITO nanofiber sensor is 10ppm. This sensor shows no response for 8 2- These results show that ITO nanofiber gas sensor exhibits significantly better sensitivity for NO2 at lower temperature and good selectivity for NO2 and H2.
AB - this paper presents the gas sensing characteristics of Indium-Tin-Oxide (ITO) nanofibers. ITO nanofibers were fabricated by electrospinning process and integrated with microheater, micro temperature sensor and interdigitaded electrodes (lED). The morphology and crystal structure of ITO nanofibers were studied by SEM and XRD, respectively. The optimal working temperature and sensitivity of the ITO nanofiber gas sensors were investigated. The ITO nanofiber gas sensor exhibits a linear current-voltage relationship. The highest sensitivity of the sensor is about 34, which is obtained at a working temperature of 300°C; and this sensor can also work at room temperature, the sensitivity at room temperature is about 5.2. The detect limitation of this ITO nanofiber sensor is 10ppm. This sensor shows no response for 8 2- These results show that ITO nanofiber gas sensor exhibits significantly better sensitivity for NO2 at lower temperature and good selectivity for NO2 and H2.
UR - http://www.scopus.com/inward/record.url?scp=70349667821&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=70349667821&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2009.5068673
DO - 10.1109/NEMS.2009.5068673
M3 - Conference contribution
AN - SCOPUS:70349667821
SN - 9781424446308
T3 - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
SP - 690
EP - 693
BT - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
T2 - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Y2 - 5 January 2009 through 8 January 2009
ER -