Abstract
Aluminum acetylacetonate and water vapor were used to deposit an amorphous Al2O3 seal coating on Si and CeO2-stabilized ZrO2 (CSZ) produced by air plasma spray. The Al2O3 coating prepared at ∼500°C was ∼2.5μm thick, uniform, and non-porous. The crystallization and adhesion characteristics of the Al2O3 coating were examined by thermally annealing the Al2O3-coated Si and CSZ substrates in air. The amorphous coating crystallized to metastable Al2O3- phases within 20 hours at temperatures as low as 700°C. The coating on Si spalled upon annealing whereas the coating on CSZ did not spall, but microcracked extensively due to the significant volume shrinkage associated with crystallization.
Original language | English |
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Pages (from-to) | 103-107 |
Number of pages | 5 |
Journal | Materials Research Society Symposium Proceedings |
Volume | 555 |
State | Published - 1999 |