Hybrid linear microactuators and their control models for mirror shape correction

Kirill Shcheglov, Xiaoning Jiang, Risaku Toda, Zensheu Chang, Eui Hyeok Yang

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Future space-based imaging systems demand ultra-lightweight mirrors, which would involve a large number of actuators to provide the needed surface correction. These lightweight actuators are required to be integrated with the mirrors to avoid a significant increase in overall areal mass density. This paper presents the fabrication and testing of a linear microactuator and the modeling of an actuated mirror composed of such lightweight actuators. The linear microactuator is driven by a combination of a piezoelectric actuator block and electrostatic comb drive units. A full nonlinear optimization model of a mirror lattice was developed to simulate a lightweight primary with embedded microactuators, which allows for an arbitrarily connected lattice with connector elements having an arbitrary stiffness and actuation response. The modeling yielded a high precision estimation of the mirror shape correction.

Original languageEnglish
Pages (from-to)159-167
Number of pages9
JournalJournal of Micro-Nano Mechatronics
Volume4
Issue number4
DOIs
StatePublished - Dec 2008

Keywords

  • Active shape correction
  • Adaptive optics
  • Bulk-micromachining
  • Large stroke
  • Linear actuator
  • Segmented mirror

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