TY - JOUR
T1 - Hybrid linear microactuators and their control models for mirror shape correction
AU - Shcheglov, Kirill
AU - Jiang, Xiaoning
AU - Toda, Risaku
AU - Chang, Zensheu
AU - Yang, Eui Hyeok
PY - 2008/12
Y1 - 2008/12
N2 - Future space-based imaging systems demand ultra-lightweight mirrors, which would involve a large number of actuators to provide the needed surface correction. These lightweight actuators are required to be integrated with the mirrors to avoid a significant increase in overall areal mass density. This paper presents the fabrication and testing of a linear microactuator and the modeling of an actuated mirror composed of such lightweight actuators. The linear microactuator is driven by a combination of a piezoelectric actuator block and electrostatic comb drive units. A full nonlinear optimization model of a mirror lattice was developed to simulate a lightweight primary with embedded microactuators, which allows for an arbitrarily connected lattice with connector elements having an arbitrary stiffness and actuation response. The modeling yielded a high precision estimation of the mirror shape correction.
AB - Future space-based imaging systems demand ultra-lightweight mirrors, which would involve a large number of actuators to provide the needed surface correction. These lightweight actuators are required to be integrated with the mirrors to avoid a significant increase in overall areal mass density. This paper presents the fabrication and testing of a linear microactuator and the modeling of an actuated mirror composed of such lightweight actuators. The linear microactuator is driven by a combination of a piezoelectric actuator block and electrostatic comb drive units. A full nonlinear optimization model of a mirror lattice was developed to simulate a lightweight primary with embedded microactuators, which allows for an arbitrarily connected lattice with connector elements having an arbitrary stiffness and actuation response. The modeling yielded a high precision estimation of the mirror shape correction.
KW - Active shape correction
KW - Adaptive optics
KW - Bulk-micromachining
KW - Large stroke
KW - Linear actuator
KW - Segmented mirror
UR - http://www.scopus.com/inward/record.url?scp=84894229662&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84894229662&partnerID=8YFLogxK
U2 - 10.1007/s12213-009-0017-2
DO - 10.1007/s12213-009-0017-2
M3 - Article
AN - SCOPUS:84894229662
SN - 1865-3928
VL - 4
SP - 159
EP - 167
JO - Journal of Micro-Nano Mechatronics
JF - Journal of Micro-Nano Mechatronics
IS - 4
ER -