Isotopic Studies of Oxidation of Si3N4 and Si using SIMS

Honghua Du; Cheryl A. Houser; Richard E. Tressler; Karl E. Spear; Carlo G. Pantano

doi:10.1149/1.2086543

Isotopic Studies of Oxidation of Si₃N₄ and Si using SIMS

Honghua Du
, Cheryl A. Houser
, Richard E. Tressler
, Karl E. Spear
, Carlo G. Pantano

Pennsylvania State University

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Original language	English
Pages (from-to)	741-742
Number of pages	2
Journal	Journal of the Electrochemical Society
Volume	137
Issue number	2
DOIs	https://doi.org/10.1149/1.2086543
State	Published - Feb 1990

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

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10.1149/1.2086543

Cite this

@article{de66b3c2928943eb8e338ebc6ddeb940,

title = "Isotopic Studies of Oxidation of Si3N4 and Si using SIMS",

author = "Honghua Du and Houser, \{Cheryl A.\} and Tressler, \{Richard E.\} and Spear, \{Karl E.\} and Pantano, \{Carlo G.\}",

year = "1990",

month = feb,

doi = "10.1149/1.2086543",

language = "English",

volume = "137",

pages = "741--742",

number = "2",

}

TY - JOUR

T1 - Isotopic Studies of Oxidation of Si3N4 and Si using SIMS

AU - Du, Honghua

AU - Houser, Cheryl A.

AU - Tressler, Richard E.

AU - Spear, Karl E.

AU - Pantano, Carlo G.

PY - 1990/2

Y1 - 1990/2

UR - https://www.scopus.com/pages/publications/0025383921

UR - https://www.scopus.com/pages/publications/0025383921#tab=citedBy

U2 - 10.1149/1.2086543

DO - 10.1149/1.2086543

M3 - Article

AN - SCOPUS:0025383921

SN - 0013-4651

VL - 137

SP - 741

EP - 742

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 2

ER -

Isotopic Studies of Oxidation of Si3N4 and Si using SIMS

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Isotopic Studies of Oxidation of Si₃N₄ and Si using SIMS