TY - GEN
T1 - Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT unimorph actuators
AU - Hishinuma, Yoshikazu
AU - Yang, Eui Hyeok
PY - 2005
Y1 - 2005
N2 - We have demonstrated a large aperture (50 mm × 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane "transferred" in its entirety onto a 20 × 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 μm at 20 V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30 %.
AB - We have demonstrated a large aperture (50 mm × 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane "transferred" in its entirety onto a 20 × 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 μm at 20 V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30 %.
KW - Deformable mirror
KW - Large-aperture
KW - Large-stroke
KW - Piezoelectric unimorph actuator
UR - http://www.scopus.com/inward/record.url?scp=27544481382&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=27544481382&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2005.1497285
DO - 10.1109/SENSOR.2005.1497285
M3 - Conference contribution
AN - SCOPUS:27544481382
SN - 0780389948
SN - 9780780389946
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 1167
EP - 1170
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -