Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT unimorph actuators

Yoshikazu Hishinuma, Eui Hyeok Yang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We have demonstrated a large aperture (50 mm × 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane "transferred" in its entirety onto a 20 × 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 μm at 20 V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30 %.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1167-1170
Number of pages4
DOIs
StatePublished - 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 5 Jun 20059 Jun 2005

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume2

Conference

Conference13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/TerritoryKorea, Republic of
CitySeoul
Period5/06/059/06/05

Keywords

  • Deformable mirror
  • Large-aperture
  • Large-stroke
  • Piezoelectric unimorph actuator

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