Large-scale fabrication of porous gold nanowires via laser interference lithography and dealloying of gold-silver nano-alloys

Adrien Chauvin, Nicolas Stephant, Ke Du, Junjun Ding, Ishan Wathuthanthri, Chang Hwan Choi, Pierre Yves Tessier, Abdel Aziz El Mel

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

In this work, we report on an efficient approach to fabricating large-area and uniform planar arrays of highly ordered nanoporous gold nanowires. The approach consists in dealloying Au-Ag alloy nanowires in concentrated nitric acid. The Au-Ag alloy nanowires were obtained by thermal annealing at 800 °C for 2 h of Au/Ag stacked nanoribbons prepared by subsequent evaporation of silver and gold through a nanograted photoresist layer serving as a mask for a lift-off process. Laser interference lithography was employed for the nanopatterning of the photoresist layer to create the large-area nanostructured mask. The result shows that for a low Au-to-Ag ratio of 1, the nanowires tend to cracks during the dealloying due to the internal residual stress generated during the dealloying process, whereas the increase of the Au-to-Ag ratio to 3 can overcome the drawback and successfully leads to the obtainment of an array of highly ordered nanoporous gold nanowires. Nanoporous gold nanowires with such well-regulated organization on a wafer-scale planar substrate are of great significance in many applications including sensors and actuators.

Original languageEnglish
Article number168
JournalMicromachines
Volume8
Issue number6
DOIs
StatePublished - 2017

Keywords

  • Dealloying
  • Laser interference lithography
  • Nanopatterning
  • Nanoporous gold

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