TY - JOUR
T1 - Laser absorption spectroscopy
T2 - Monitoring and Control of Plasma-Enhanced Processing of Semiconductors 1988
AU - Whittaker, Edward A.
AU - Shum, Chi Man
N1 - Publisher Copyright:
© 1989 SPIE. All rights reserved.
PY - 1989/3/15
Y1 - 1989/3/15
N2 - We present a summary of our efforts to develop a general purpose probe for plasma and other gas phase processing techniques based on laser absorption spectroscopy. This method offers several advantages for gas phase point monitoring, including line-of-sight optical access, small solid angle detection, absolute species concentration calibration and simple interpretation of spectra. Drawbacks to overcome include limited sensitivity due to laser technical noise and limited spectral coverage of high resolution tunable dye and diode lasers.
AB - We present a summary of our efforts to develop a general purpose probe for plasma and other gas phase processing techniques based on laser absorption spectroscopy. This method offers several advantages for gas phase point monitoring, including line-of-sight optical access, small solid angle detection, absolute species concentration calibration and simple interpretation of spectra. Drawbacks to overcome include limited sensitivity due to laser technical noise and limited spectral coverage of high resolution tunable dye and diode lasers.
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U2 - 10.1117/12.951014
DO - 10.1117/12.951014
M3 - Conference article
AN - SCOPUS:85075498990
SN - 0277-786X
VL - 1037
SP - 43
EP - 49
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
Y2 - 1 November 1988 through 3 November 1988
ER -