Laser absorption spectroscopy: A sensitive gas phase processing monitor

Edward A. Whittaker, Chi Man Shum

Research output: Contribution to journalConference articlepeer-review

Abstract

We present a summary of our efforts to develop a general purpose probe for plasma and other gas phase processing techniques based on laser absorption spectroscopy. This method offers several advantages for gas phase point monitoring, including line-of-sight optical access, small solid angle detection, absolute species concentration calibration and simple interpretation of spectra. Drawbacks to overcome include limited sensitivity due to laser technical noise and limited spectral coverage of high resolution tunable dye and diode lasers.

Original languageEnglish
Pages (from-to)43-49
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1037
DOIs
StatePublished - 15 Mar 1989
EventMonitoring and Control of Plasma-Enhanced Processing of Semiconductors 1988 - Santa Clara, United States
Duration: 1 Nov 19883 Nov 1988

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