Liquid transport properties in sub-micron channel flows

K. Johan A. Westin, Kenneth S. Breuer, Chang Hwan Choi, Peter Huang, Zhigiang Cao, Bruce Caswell, Peter D. Richardson, Merwin Sibulkin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

An experimental set-up for pressure driven liquid flow through microchannels have been designed and tested. The flow rate is determined by tracking the free liquid surface in a precision bore hole using a laser distance meter. Measurements of the flow rate through silicon microchannels with a height of less than 0.9 μm show good results for Newtonian fluids (silicon oil, ethanol) at flow rates as low as 0.2 nl/s. The experimental results are also in very good agreement with predictions based on laminar channel flow using no-slip boundary conditions, indicating that standard macroscopic assumptions are still valid for these fluids under these conditions. However, experiments with aqueous solutions show anomalies in the form of unexpectedly low flow rates and time dependent variations. Possible explanations to these observations are discussed.

Original languageEnglish
Title of host publicationMicro-Electro-Mechanical Systems (MEMS) - 2001
EditorsA.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
Pages611-618
Number of pages8
StatePublished - 2001
Event2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States
Duration: 11 Nov 200116 Nov 2001

Publication series

NameAmerican Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)
Volume3

Conference

Conference2001 ASME International Mechanical Engineering Congress and Exposition
Country/TerritoryUnited States
CityNew York, NY
Period11/11/0116/11/01

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