Low‐Pressure Chemical Vapor Deposition of α‐Si₃N₄ from SiF₄ and NH₃: Nucleation and Growth Characteristics

The crystal structure and surface morphology of Si₃N₄ prepared by LPCVD were characterized as a function of processing conditions. Temperature was the most dominant variable which affected the coating microstructure. Strongly faceted crystalline Si₃N₄ was deposited at temperatures above ∼ 1410°C. In the temperature range of 1300° to 1410°C, crystalline and amorphous phases were codeposited. The content of the crystalline phase rapidly decreased with decreased temperature. In this temperature range, the coating crystallinity was also influenced by kinetic factors such as deposition rate and reagent depletion. For example, Si₃N₄ became more crystalline as the deposition rate was decreased by either decreasing the flow rate or increasing the NH₃/SiF₄ molar ratio. At ∼ 1300°C, the coating surface appeared fully botryoidal, and the coatings were mostly amorphous. Changes in the orientation and size of Si₃N₄ crystallites were parametrically documented. As the temperature was increased, the Si₃N₄ grains generally became more preferentially oriented to the (102) and/or (l0l) where l= 1,2,3,., directions. The average facet size increased with coating thickness.